High Resolution Industrial CT System for Fine Parts Inspection

The YXLON FF20 CT computed tomography system is designed to achieve the best 3D inspection results at very high resolution. Whether for R&D, defect analysis, process monitoring, or CT metrology, the FF20 CT is ideally suited for inspection of a variety of very small components from the electronics and material science industries.

  • 2D detail visibility of up to 150 nm with new water-cooled 190 kV transmission tube 
  • Temperature stability with granite-based manipulation
  • Innovative touchscreen for intuitive operation via graphical symbols
  • Application flexibility using trajectories such as helical CT scan, horizontal field-of-view extension, virtual rotation axis, and standard Quick/QualityScan
  • Precise metrology MPESD = 3,9 µm + L/75, measured as a deviation of sphere distance referring to VDI 2630-1.3