Emmi™ Photoemission Microscopy

QFI owns the original patent on the photoemission technique; emmiTM is a trademark on QFI’s  photoemission microscopy systems.  Photoemission solutions are targeted at detecting and localizing gate leakage, dielectric breakdown, forward bias junction, oxide pinholes, and many other failures, which result in electron-hole recombination. Highly sensitive, very low noise sensors (cameras) capture small particles of light (photons) created during this electron-hole recombination.  The emmiTM process includes the capture of a reflected mode (reference) image of the DUT.  Then, illumination is turned off, and an emission mode image captures the photoemission events. The reference image and emission image are overlaid to highlight the location of emission sites on the DUT.